A Contact and Non-Contact Hybrid Profilometer with Large Range

摘要

A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring techniques. The ambiguity presented inconventional monochromatic interferometers is not present in the contact and non-contact measurement, and they have a virtually unlimited unambiguous range. For the contact measurement, the vertical measuring range is +-5 mm with a resolution of 1 nm and the horizontal measuring range is +-25 mm in x-range and y-range with a resolution of 1.25 mu m; for the non-contact measurement, the vertical measuring range is +-5 mm with a resolution of 1 nm and the horizontal resolution better than 0.5 mu m.