Development of a Large Range Nanometer Level Profilometer with Controlled Contact Force

摘要

A nanometer profilometer in which the measuring force can be controlled is proposed. The key part is the nanometer profiling core, which consists of a voice coil motor with a short and movable voice coil and an inductive transducer. According to the A/D value of the transducer signal, the measuring force can be adjusted to approximately μN level by use of a PID control algorithm. The advantages of contact type and non-contact type profilometer are possessed by the proposed instrument.