To Improve the Atomic Force Microscopic (AFM) Printing Process of Liquid Crystal Display (LCD)

摘要

Six Sigma is to introduce DMAIC (Define, Measure, Analyze, Improve, Control) in manufacturing process to improve product quality and reduce defect products. At the improvement stage, the Mahalanobis-Taguchi System, given its capability of classification and feature selection, is integrated to reduce the redundant testing items in the testing procedure, and provide a test flow of better economic benefits. The important variables screened by the Reduced Model in MTS are C_2, C_5 and the classification accuracy rate is 99.73%. The Atomic force microscopic thickness average has been reduced from 707.38 A to 701.16 A. The standard deviation is reduced from 45.76 to 8.73, PCI is raised from 0.73 to 3.81, process accuracy is improved from 0.07 to 0.012, and process performance is improved from 0.67 to 3.76. Finally, this study confirmed that the new process parameters can reduce the alignment film thickness variance, and enhance the overall LCD chromaticity yield.