Study of tribological performance of ECR-CVD diamond-like carbon coatings on steel substrates Part 1. The effect of processing parameters and operating conditions

摘要

Diamond-like carbon (DLC) coatings were prepared on AISI 440C steel substrates at room temperature by electron cyclotron resonance chemical vapor deposition (ECR-CVD) process in C{sub}2H{sub}2/Ar plasma. Using the designed Ti/TiN/TiCN/TiC interfacial transition layers, relatively thick DLC coatings (1-2 μm) were successfully prepared on the steel substrates. The friction and wear performance of the DLC coatings was evaluated by ball-on-disk tribometry using a steel counterbody at various normal loads (1-10 N) and sliding speeds (2-1.5 cm/s). By optimizing the deposition parameters such as negative bias voltage, DLC coatings with hardness up to 30 GPa and friction coefficients lower than 0.15 against the 100Cr6 steel ball could be obtained. The friction coefficient was maintained for 100,000 cycles (～2.2 km) of dry sliding in ambient environments. In addition, the specific wear rates of the coatings were found to be extremely low (～10{sup}(-8) mm{sup}3/Nm); at the same time, the ball wear rates were one order of magnitude lower. The influences of the processing parameters and the sliding conditions were determined, and the frictional behavior of the coatings was discussed. It has been found that higher normal loads or sliding speeds reduced the wear rates of the coatings. Therefore, it is feasible to prepare hard and highly adherent DLC coatings with low friction coefficient and low wear rate on engineering steel substrates by the ECR-CVD process. The excellent tribological performance of DLC coatings enables their industrial applications as wear-resistant solid lubricants on sliding parts.