GLANCING-INCIDENCE X-RAY ANALYSIS OF THIN-LAYERED MATERIALS - A REVIEW

摘要

Glancing-incidence x-rays provide a wealth of possibilities for the analysis of thin layers and multilayers. This paper discusses reflectometry under both specular and non-specular conditions, and also the combination with angle-dependent x-ray fluorescence. From these measurements information can be obtained on layer thickness, interface quality and compositional depth profile. First the historical development of glancing-incidence x-ray analysis is sketched. Then tbe physical principles of the interaction of glancing-incidence x-rays with samples which may contain rough interfaces are discussed. The equipment, which allows for both x-ray fluorescence and reflectivity measurements, is also described. The possibilities are illustrated with a number of examples from the literature. [References: 59]