Surface Analysis of Fe-Cr Alloy by Glancing-Incidence and -Takeoff X-ray Fluorescence Method

摘要

We have developed a glancing-incidence and -takeoff X-ray fluorescence (GIT-XRF) method for a nondestructive surface analysis at normal air pressure. Since the GIT-XRF method utilizes an X-ray total reflection phenomenon which occurs on a flat surface, many applications of this method were restricted to a thin-film analysis on a flat Si wafer so far. In this paper, we show that it is possible to apply this method to surface analysis of common metals like Fe-Cr alloys. It was found that a Fe-20%Cr alloy, which was carefully polished with a precise-polishing machine, could be measured by the GIT-XRF method. The experimental results for the oxidized Fe-20%Cr alloy were compared with the calculated curves using a layered model, which was modified to fit with the experimental results. As a result, the thickness of the oxide layer and the depth profile were evaluated.