Mechanical and Tribological Properties of TiTaBN Graded-Composite Coatings Deposited Using the CFUBMS Technique

摘要

In this study, TiTaBN graded-composite coatings were deposited utilizing different process parameters on D2 steel and glass substrates using pulsed DC closed-field unbalanced magnetron sputtering (CFUBMS). The morphology and structure of the coatings were analyzed using scanning electron microscopy (SEM), energy-dispersive spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. The hardness and critical load values of the coatings were determined using a microhardness tester and scratch tester, respectively. The tribological properties of the coatings were analyzed in different testing environments using a pin-on-disc tribometer. The properties of the coatings were found to be strongly affected by the coating parameters. The maximum thickness and hardness were obtained at the lowest nitrogen flow rate and highest frequency. Critical load values of coatings were increased with increased nitrogen flow rate. The low nitrogen flow rate and high frequency across the coatings resulted in enhanced tribological properties.