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Rippling on Wear Scar Surfaces of Nanocrystalline Diamond Films After Reciprocating Sliding Against Ceramic Balls

机译:陶瓷球往复滑动后纳米晶金刚石薄膜磨损痕迹表面的涟漪

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The formation of nanoscopic ripple patterns on top of material surfaces has been reported for different materials and processes, such as sliding against polymers, high-force scanning in atomic force microscopy (AFM), and surface treatment by ion beam sputtering. In this work, we show that such periodic ripples can also be obtained in prolonged reciprocating sliding against nanocrystalline diamond (NCD) films. NCD films with a thickness of 0.8 μm were grown on top of silicon wafer substrates by hot-filament chemical vapor deposition using a mixture of methane and hydrogen. The chemical structure, surface morphology, and surface wear were characterized by Raman spectroscopy, scanning electron microscopy (SEM), and AFM. The tribological properties of the NCD films were evaluated by reciprocating sliding tests against Al_2O_3, Si_3N_4, and ZrO_2 counter balls. Independent of the counter body material, clear ripple patterns with typical heights of about 30 nm induced during the sliding test are observed by means of AFM and SEM on the NCD wear scar surfaces. Although the underlying mechanisms of ripple formation are not yet fully understood, these surface corrugations could be attributed to the different wear phenomena, including a stress-induced micro-fracture and plastic deformation, a surface smoothening, and a surface rehybridization from diamond bonding to an sp~2 configuration. The similarity between ripples observed in the present study and ripples reported after repeated AFM tip scanning indicates that ripple formation is a rather universal phenomenon occurring in moving tribological contacts of different materials.
机译:对于不同的材料和工艺,例如在聚合物上滑动,原子力显微镜(AFM)中的高强度扫描以及通过离子束溅射进行的表面处理,已经报道了在材料表面顶部形成纳米级波纹图案的报道。在这项工作中,我们表明,在纳米晶金刚石(NCD)薄膜的长时间往复滑动中,也可以获得这种周期性的波纹。通过使用甲烷和氢气的混合物进行热丝化学气相沉积,在硅晶片基板的顶部生长厚度为0.8μm的NCD膜。化学结构,表面形态和表面磨损通过拉曼光谱,扫描电子显微镜(SEM)和AFM进行表征。通过对Al_2O_3,Si_3N_4和ZrO_2埋藏球进行往复滑动测试,评估了NCD膜的摩擦学性能。独立于配体材料,通过NFM磨损痕迹表面上的AFM和SEM观察到了滑动测试期间产生的典型高度约为30 nm的清晰波纹图案。尽管尚未完全理解波纹形成的潜在机理,但这些表面波纹可归因于不同的磨损现象,包括应力引起的微裂纹和塑性变形,表面平滑以及从金刚石结合到表面的再杂化。 sp〜2配置。在本研究中观察到的波纹与重复进行AFM尖端扫描后报告的波纹之间的相似性表明,波纹形成是一种在不同材料的移动摩擦接触中发生的相当普遍的现象。

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