nanocrystalline diamond film and its manufacturing method , and apparatus using nanocrystalline diamond film

摘要

The present invention is synthesized on the gas , the grain size is more than 1 , 1000 less than nano-crystal diamond is a nano- crystal diamond film comprising as a main component. The nano- crystal diamond film on a substrate , by a plasma CVD method using a source gas containing a hydrocarbon and hydrogen , is deposited outside the plasma region . In addition, the nano- crystal diamond film , the electrochemical device , an electrochemical electrode , DNA chip , an organic electroluminescent device , organic light receiving element, an organic thin film transistor , a cold electron-emitting devices , fuel cells , and is applied to the catalyst .