Lubrication of microelectromechanical systems (MEMS) using bound and mobile phases of Fomblin Zdol

摘要

A lubrication scheme for MEMS electrostatic lateral output motors based on a mixture of bound and mobile lubricant was studied. Lubrication by bound monolayer alone provided some increase in operational life, but after a short time, the film wore away and the device failed in the unlubricated mode. A mobile phase was used to provide lubricant replenishment. Tribological studies were conducted on Si(100) wafers, as well as on MEMS electrostatic lateral output motors, dip-coated with a mixture of bound and mobile phases of Fomblin Zdol. Accelerated screening tests on Si(100) wafers were undertaken using a pin on disk tribometer. However, the optimum balance of bound and mobile phases was determined by studies on the device itself. The fractional surface coverage of lubricant and the ratio of bound to mobile phase was varied through selection of reaction temperature and rinse chemistry. The mobile phase on model surfaces and devices acted as a source of lubricant replenishment, and together with the bound phase provided dramatic improvement in performance. The wide variation seen in the performance of individual devices suggests that dip coating does not provide a uniform coating on the contacting surfaces of these devices.