System and method for lossless phase noise cancellation in a microelectromechanical system (MEMS) resonator

摘要

An oscillator circuit including a microelectromechanical system (MEMS) resonator is provided. The circuit includes a surface acoustic wave (SAW) resonator having a first input transducer responsive to a first input signal for transducing the first input signal into mechanical motion of a substrate material of the resonator, a second input transducer responsive to a second input signal for transducing the second input signal into mechanical motion of the substrate material, and a first output transducer configured to transduce the mechanical motion of the substrate material of the resonator into an output electrical signal. A feedback loop is provided and configured to generate the second input signal, wherein the second input signal is indicative of a detected phase error of the output of the resonator.