Atomic Force Microscope Investigation on Static Nanomechanical Properties Versus Dynamic Nanotribological Evaluation of Metal-ZrN and ZrN Thin Films

摘要

The present study offers for the first time a correlation between static nanomechanical properties (nanohardness (H), elastic modulus (E), H/E and H~3/E~2 ratio) and dynamic properties (resulting from nanoscratch measurements) for Metal-ZrN thin films (Inconel-ZrN, Cr-ZrN and Nb-ZrN) as well as monolayer polycrystalline ZrN thin films. Metal-ZrN thin films have a great industrial potential, as they can combine high hardness with good elasticity and toughness making them effective for wear resistant application. Nanomechanical and nanotribological properties of Metal-ZrN and ZrN thin films deposited by DC unbalanced magnetron sputtering were investigated using an atomic force microscope interfaced with a Hysitron Triboscope. The elastic recovery of thin films under a normal load applied during nanoindentation was evaluated and correlated with elastic recovery of thin films under dynamic loading during nanoscratch measurements in order to asses which film compositions provide superior wear resistance. It is demonstrated that dynamic elastic recovery measurements correlated well with those derived from static nanoindentation tests. The nanoscratch test combines both normal and tangential loading, therefore, it is expected to be an even better predictor of wear-resistance. The AFM nanoindentation and nanoscratch measurements show superior nanomechanical and nanotribological properties for Metal-ZrN thin films when compared to polycrystalline ZrN thin films.