Fabrication and Tribological Investigation of Fullerene C60/C70 Reinforced Epoxy Resin SU-8

摘要

For a reliable function of micro actuators, minimizing wear at the mechanical interface is of considerable importance. This is particularly true, if organic materials are used at the interface, like the photosensitive epoxy resin SU-8, which is used quite often in Micro Electro-mechanical Systems (MEMS). One promising approach to improve the tribological properties of SU-8 is adding fullerenes. For the tests a combination of C60 and C70 fullerenes were used. As delivered, the material agglomerates. To reduce the agglomerates size, the fullerenes were suspended in isopropanol by ultrasonically exication. The suspension also prevented the nanoparticles from escaping to the environment. The paper presents hardness and wear test results for unfdled and filled SU-8 films.