Progress in Micro- and Nanopatterning via Electrochemical Lithography

摘要

In this paper we present a critical overview on recent progress in electrochemical methods for nanopatterning and nanofabrication. In the first part we consider recent advancements in. serial methods, which are mostly based on scanning probe microscopy. We also show applications for nanopatterning, electropolymerization, and dots fabrication. In the second part, we consider the up-grading from serial to parallel with particular attention to the most recent and promising progress. We show the most interesting results highlighting the problems, limits, and future directions.