Application of a Laser-Speckle Correlation Technique for Measuring Local Strain in Micromaterials

摘要

Non-contact strain measurements of materials with micrometer dimensions, like used in microelectronics and microsystems, are rapidly expanding fields in materials science. Mechanical properties of "micromaterials" can differ significantly from those determined from their bulk analogs. Materials testing in small dimensions is necessary to enhance the reliability of microsystems. Optical methods circumventing surface marking or preparation therefore play an important role and open new testing possibilities where standard testing techniques cannot be used.