Wide-range tunable magnetic lens for tabletop electron microscope

摘要

A tabletop scanning electron microscope (SEM) utilizes permanent magnets as condenser lenses to minimize its size, but this sacrifices the tunability of condenser lenses such that a tabletop system can only be operated with a fixed accelerating voltage. In contrast, the traditional condenser lens utilizes an electromagnetic coil to adjust the optical properties, but the size of the electromagnetic lens is inevitably larger. Here, we propose a tunable condenser lens for a tabletop SEM that uses a combination of permanent magnets and electromagnetic coils. The overall dimensions of the newly designed lens are the same as the original permanent magnet lens, but the new lens allows the tabletop SEM to be operated at different accelerating voltages between 1 kV and 15 kV. (C) 2016 Elsevier B.V. All rights reserved.