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Effect of P-induced Gettering on Extended Defects in n-type Multicrystalline Silicon

机译:P型吸杂对n型多晶硅中扩展缺陷的影响

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The electrical properties and the minority charge carrier recombination behaviour of grain boundaries (GBs) and intragrain dislocations in different n-type multicrystalline silicon (mc-Si) ingots were systematically studied through microwave-detected PhotoConductance Decay (MU W-PCD), Electron Beam Induced Current (EBIC) and PhotoLuminescence (PL) spectroscopy on as-grown samples and on samples submitted to P-diffusion step. It was confirmed that the overall quality of n-type mc-Si is high, indicating that n-type-Si is a valid source for photovoltaic applications. As expected, the average lifetime increases after the P-diffusion process, which induces impurity gettering effects at the external surfaces, like in the case ofp-type samples, but an evident local increase of electrical activity of some GBs after that process was also observed using the EBIC mapping technique. Apparently, a redistribution of impurities occurs at the processing temperature and impurities are captured at the deepest sinks. In fact, while all GBs act as heterogeneous segregation/precipitation sites, some of them will compete with the external surfaces sinks, partly vanishing the effect of P-gettering. Last but not least, it was experimentally demonstrated that the average lifetime values measured with the mu W-PCD technique well correlate with the recombination activity of GBs measured with the EBIC technique, showing the extreme importance of GBs on the effective lifetime of this material.
机译:通过微波检测光电导衰减(MU W-PCD),电子束系统研究了不同n型多晶硅(mc-Si)晶锭的晶界(GBs)和晶粒内位错的电学性质以及少数载流子复合行为。生长中的样品和进行P扩散步骤的样品的感应电流(EBIC)和光致发光(PL)光谱。可以肯定的是,n型硅的整体质量很高,表明n型硅是光伏应用的有效来源。正如预期的那样,在P扩散过程之后,平均寿命会增加,这会在外表面上引起杂质吸收作用,就像在p型样品的情况下一样,但是在该过程之后,还观察到某些GB的电活性明显增加使用EBIC映射技术。显然,在处理温度下会发生杂质的重新分布,并且杂质会在最深的阱处被捕获。实际上,尽管所有GB都充当异质的分离/沉淀位点,但其中一些GB将与外表面下沉竞争,从而部分消除了P吸气的影响。最后但并非最不重要的一点是,通过实验证明,使用mu W-PCD技术测得的平均寿命值与使用EBIC技术测得的GBs的重组活性高度相关,表明GBs对这种材料的有效寿命极为重要。

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