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Super-Resolution Long-Depth Focusing by Radially Polarized Light Irradiation Through Plasmonic Lens in Optical Meso-field

机译:光学中视场中通过等离激元透镜的辐射偏振光辐射的超高分辨率长焦距聚焦

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摘要

In this paper, we propose a novel plasmonic lens design consisting of an annular slit and concentric grooves. The simulation results show that under radially polarized illumination, a super-resolution long depth of focus (DOF) spot can be achieved in optical meso-field due to the constructive interference of scattered light by the concentric grooves. We also analyze the influence of depth-tuned annular grooves on focusing performance, including focal length, DOF, and full-width half-maximum. Moreover, focusing efficiency can be enhanced (~350 %) by introducing a circular metallic grating which surrounds the annular slit. This plasmonic lens has potential applications in nanoimaging and nano-photolithography.
机译:在本文中,我们提出了一种新颖的等离子透镜设计,该设计由环形狭缝和同心凹槽组成。仿真结果表明,在径向偏振照明下,由于同心凹槽对散射光的相长干涉,可以在光学细观场中实现超分辨率长焦深(DOF)点。我们还分析了深度调谐环形凹槽对聚焦性能的影响,包括焦距,自由度和全宽半最大值。此外,通过引入围绕环形狭缝的圆形金属光栅,可以提高聚焦效率(约350%)。该等离子透镜在纳米成像和纳米光刻中具有潜在的应用。

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