Dynamic processing of SiH_4+CH_4 plasma induced by an infrared laser

摘要

In this paper, the time- and space-resolved optical emission spectrum is used to study dynamic processes in a SiH4+CH4 plasma induced by a pulsed transversely excited atmosphere CO2 laser. The main results include the following: (1) Based on the emission analysis of the plasma in different positions and experimental conditions, it is found that laser-induced breakdown of sample gases produced a detonation wave and then expanded in a similar manner to produce a shock wave. (2) Through the measurement of the time resolution of the profile of H beta emission, we found the deionization of the plasma is mainly due to the recombination of ions and electrons. (3) The time characteristics of the emission spectra of various fragments support the explanation that production of Si and C atoms are the main dissociation channels for SiH4 and CH4 in the plasma.