Deposition of Hydroxyapatite Film on Titanium by Ultra-fine Particle Beam

摘要

A hydroxyapatite (HA) film was fabricated on a titanium (Ti) plate by an aerosol deposition method (ADM) using an HA submicron-size particle beam. In this process, neither substrate nor HA particles were heated during deposition. The effect of varying the beam incident angle on the HA film formation was investigated. The incidence angle of the beam was varied from 0° to 60° with a period of 20° by rotation of the substrate. Adhesion strength between the HA film and the Ti plate was increased as the incident angle increased although its thickness was decreased. In the films formed at an incident angle of 60°, the adhesion strength was found to be higher than 30 MPa. Possible formation mechanisms of the HA film dependent on the incident angle were discussed