X-RAY STUDY OF METALLIC THIN FILMS DEPOSITED ON POLYMERIC AND CERAMIC SUBSTRATES

摘要

An investigation concerning the structure of aluminium, chromium and titanium layers deposited on polyethyleneterephthalate (PET) film and, also, of copper and tin thin films deposited on alumina substrate has been performed. X-ray data processing shows the change of the thin films properties (orientation, structural defects and internal stresses) according to the method applied to obtain them, thermal treatments and the nature of the substrate. Conclusions regarding the proper choice of the deposition conditions and the improvement of adhesion in the investigated thin film/substrate systems have been inferred.