Microelectronics meets mechanical engineering

摘要

Micro Electro Mechanical Systems (MEMS) are minute but powerful machines, normally fabricated using microelectronics techniques, but featuring mechanical or hydraulic functions. Think silicon chips incorporating tiny mechanical devices such as sensors, valves, gears, mirrors, and actuators. Driven by global multinationals such as Analog Devices, Robert Bosch, Motorola and Hewlett Packard, sales are steadily increasing, and the US-based Small Times magazine recently reported that revenues are forecast to increase at a rate of 13.1 percent per annum to almost $10 billion in 2008, up from $5.3 billion in 2003.