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Performance analysis of Schottky diodes based on Bi doped p-ZnO thin films

机译:基于Bi掺杂p-ZnO薄膜的肖特基二极管的性能分析

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摘要

In the present paper, Bismuth (Bi) doped ZnO thin film have been deposited using sol gel spin coating technique to produce p-type ZnO films on n-Si substrate. The deposited Bi doped ZnO thin films were characterized using X-ray diffraction (XRD), atomic force microscopy (AFM), hot point probe and hall measurement. The XRD and AFM characterization results shows uniform growth of the film over the entire substrate having polycrystalline nature of the film and Hall measurement and hot point probe method shows p-type nature of the deposited Bi doped ZnO film. Further, Palladium (Pd) and Nickel (Ni) metal contacts have been deposited over separate Bi doped ZnO thin films using vacuum coating method to fabricate Schottky diodes. The current voltage characteristics have been analyzed by using conventional thermionic emission model, Cheung's method and Norde's technique to calculate the barrier height, ideality factor and series resistance of the fabricated Schottky diodes. From the calculations, it is observed that Cheung's method gives more realistic results for estimating diode parameters.
机译:本文采用溶胶-凝胶旋涂技术沉积了掺铋(Bi)的ZnO薄膜,在n-Si衬底上制备p型ZnO薄膜。使用X射线衍射(XRD),原子力显微镜(AFM),热点探针和霍尔测量来表征沉积的Bi掺杂的ZnO薄膜。 XRD和AFM表征结果显示出膜在整个基底上均匀生长,具有膜的多晶性质,霍尔测量和热点探针法显示出沉积的Bi掺杂ZnO膜的p型性质。此外,已经使用真空涂覆方法在单独的Bi掺杂的ZnO薄膜上沉积了钯(Pd)和镍(Ni)金属触点,以制造肖特基二极管。通过使用传统的热电子发射模型,Cheung方法和Norde技术来分析当前的电压特性,以计算所制造的肖特基二极管的势垒高度,理想因子和串联电阻。从计算中可以看出,Cheung的方法为估算二极管参数给出了更为实际的结果。

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