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Deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond

机译：基于氧/氟封端（100）金刚石的深紫外探测器

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摘要

In this study, deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond (O-/F-diamond) have been fabricated. Both of the O-/F-diamond surfaces have been formed on different areas of one (100) diamond sample by O_2 and CF_4 plasma. Pd has been evaporated on the O-/F-diamond surfaces to form Schottky contact, whose barrier heights have been investigated by X-ray photoelectron spectroscopy technique. Deep-ultraviolet detector based on F-diamond shows lower dark current than that based on O-diamond.
机译：在这项研究中，制造了基于氧/氟封端的（100）金刚石（O- / F-金刚石）的深紫外探测器。 O- / F金刚石表面均通过O_2和CF_4等离子体在一个（100）金刚石样品的不同区域上形成。 Pd已在O- / F金刚石表面上蒸发以形成肖特基接触，其势垒高度已通过X射线光电子能谱技术进行了研究。基于F-金刚石的深紫外检测器显示出比基于O-金刚石的暗电流更低的暗电流。

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  • 来源
    《Superlattices and microstructures》 |2016年第12期|258-265|共8页
  • 作者

    F.N. Li; J.W. Zhang; X.L. Wang; Z.C. Liu; W. Wang; J. Fu; T.F. Zhu; H.X. Wang;

  • 作者单位

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, Xi'an, 710049, China;

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, Xi'an, 710049, China;

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, Xi'an, 710049, China;

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, Xi'an, 710049, China;

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, Xi'an, 710049, China;

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, Xi'an, 710049, China;

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, Xi'an, 710049, China;

    Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, Xi'an, 710049, China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    CVD diamond; Fluorine-terminated; DUV detector; XPS;

    机译：CVD金刚石;氟封端;DUV检测器;XPS;

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