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Liquid phase heteroepitaxial growth on convex substrate using binary phase field crystal model

机译:二元相场晶体模型在凸衬底上液相异质外延生长

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摘要

The liquid phase heteroepitaxial growth on convex substrate is investigated with the binary phase field crystal (PFC) model. The paper aims to focus on the transformation of the morphology of epitaxial films on convex substrate with two different radiuses of curvature (Omega) as well as influences of substrate vicinal angles on films growth. It is found that films growth experience different stages on convex substrate with different radiuses of curvature (Omega). For Omega = 512 Delta x, the process of epitaxial film growth includes four stages: island coupled with layer-by-layer growth, layer-by-layer growth, island coupled with layer-by layer growth, layer-by-layer growth. For Omega =1024 Delta x, film growth only experience islands growth and layer-by-layer growth. Also, substrate vicinal angle (pi) is an important parameter for epitaxial film growth. We find the film can grow well when pi = 2 degrees for = 512 Delta x, while the optimized film can be obtained when pi = 4 degrees for Omega = 512 Delta x. (C) 2018 Elsevier Ltd. All rights reserved.
机译:用二元相场晶体(PFC)模型研究了凸衬底上的液相异质外延生长。本文旨在着重研究具有两个不同曲率半径(Ω)的凸衬底上外延膜的形貌变化,以及衬底邻角对膜生长的影响。发现在具有不同曲率半径(Ω)的凸衬底上,膜的生长经历了不同的阶段。对于Omega = 512 Delta x,外延膜生长过程包括四个阶段:岛与逐层生长耦合,逐层生长,岛与逐层生长耦合,逐层生长。对于Omega = 1024 Delta x,胶片的生长仅经历孤岛生长和逐层生长。而且,衬底的毗连角(pi)是外延膜生长的重要参数。我们发现,当pi = 2时(对于512 Delta x),薄膜可以很好地生长,而当pi = 4时(对于Omega = 512 Delta x),可以获得最佳的薄膜。 (C)2018 Elsevier Ltd.保留所有权利。

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  • 来源
    《Superlattices and microstructures》 |2018年第6期|275-283|共9页
  • 作者单位

    Northwestern Polytech Univ, State Key Lab Solidificat Proc, Xian 710072, Shaanxi, Peoples R China;

    Northwestern Polytech Univ, State Key Lab Solidificat Proc, Xian 710072, Shaanxi, Peoples R China;

    Northwestern Polytech Univ, State Key Lab Solidificat Proc, Xian 710072, Shaanxi, Peoples R China;

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