Solid state: Memories amass more data per chip, while several companies ready the first nonoptical lithography machines

摘要

A discussion is presented of the `plate pushing' technique which works by pulsing the plate in a cell between ground and voltage-supply level, raising the signal above the supply level. In effect, this forces additional charge out of a storage capacitor when the capacitor is accessed. Thus, smaller capacitors can be used, increasing the density of the chip. Also examined is the production of the 256KB RAM, commercial production of GaAs chips, and the new lithographic systems.