A Micromechanical Mode-Localized Voltmeter

摘要

This paper reports a high-resolution voltmeter based on applying mode localization in a 3 DOF (degree of freedom) weakly coupled resonators (WCRs) system. When the input voltage is applied to the input electrode, stiffness perturbations are introduced into the two outer resonators, leading to a drastic change in mode shape owing to the mode localization phenomenon. Therefore, the input voltage can be detected by measuring the amplitude ratio shift of the WCRs. The theoretical model of the sensitivity is established and the detailed performances of the voltmeter are also given. The measured relative shift of amplitude ratio (~12549112 ppm/V) is 2918 times higher than that of the resonant frequency (~4295 ppm/V). The noise floor of the voltmeter is $3~mu ext{V}/surd $ Hz under the closed-loop test and errors of repeatability and backhaul are both less than 3%.