A CMOS Sensor Optimized for Laser Spot-Position Detection

摘要

An optical sensor architecture optimized for flying-spot, triangulation-based, three-dimensional (3-D) laser scanners will be presented. The architecture implements a spot-position detection algorithm based on a two-step procedure that allows for improved dynamic range and readout speed. The sensor, which contains two linear arrays of pixels, analog readout channels, and digital signal preprocessing circuitry, has been fabricated in 0.6-(mu)m CMOS double-poly triple-metal technology and measures 8.17 X 5.67 mm~(2). Pixel size and shape have been selected for reducing the effect of laser speckle and for the possibility of measuring color in a multiwavelength 3-D scanner. Electrooptical test results confirm the sensor behavior as expected from simulations on a dynamic range of 80 dB and exhibits a maximum speed of 50-k voxel/s.