Parallel Detection of Si-Based Microcantilevers Resonant Frequencies Using Piezoresistive Signals Downmixing Scheme

摘要

Piezoresistive microcantilevers were developed to be used as displacement or force sensors associated with self-detection onboard electronic systems. The aim of this work was to realize a parallel integrated and compact detection system without the need for an optical readout scheme. The electronics developed specifically for this application, when dynamically operated, allows us to measure each piezoresistive microcantilever resonance frequency (by achieving at the same time an enhancement of the quality factor) with an accuracy of 0.1 Hz