Zeolite based trace humidity sensor for high temperature applications in hydrogen atmosphere

摘要

We present a humidity sensor based on H-ZSM-5 type zeolite that is suitable to detect traces of humidity (～10-110ppmv) under harsh conditions, e.g. reducing atmosphere (H_2) and high temperature (up to 600℃). By means of complex impedance spectroscopy (IS) we show that the zeolite sensor responds linearly towards minimal changes in humidity. Therefore this result indicates that the zeolite sensor is capable to detect traces of humidity in processes where high temperatures in a hydrogen environment are required.