机译:原子层沉积的Al_2O_3作为高介电常数电介质的电荷注入层的应用
Technische Universitaet Darmstadt, Institute of Materials Science, Surface Science Division, Jovanka-Bontschits-Strasse 2, D-64287 Darmstadt, Germany;
Technische Universitaet Darmstadt, Institute of Materials Science, Surface Science Division, Jovanka-Bontschits-Strasse 2, D-64287 Darmstadt, Germany;
Technische Universitaet Darmstadt, Institute of Materials Science, Surface Science Division, Jovanka-Bontschits-Strasse 2, D-64287 Darmstadt, Germany;
Technische Universitaet Darmstadt, Institute of Materials Science, Surface Science Division, Jovanka-Bontschits-Strasse 2, D-64287 Darmstadt, Germany;
Technische Universitaet Darmstadt, Institute of Materials Science, Surface Science Division, Jovanka-Bontschits-Strasse 2, D-64287 Darmstadt, Germany;
(Ba; Sr)TiO_3; charge transport; Al_2O_3; band alignment;
机译:潜在栅极电介质应用原子层沉积方法沉积的Al_2O_3 / HfO_2和Al_2O_3 / ZrO_2双层的比较
机译:以原子层沉积的Ta_2O_5 / Al_2O_3 / TiO_2 / Al_2O_3 / Ta_2O_5纳米复合结构作为电荷俘获层的出色存储特性
机译:减少原子层沉积的Al_2O_3电介质中的固定电荷
机译:原子层沉积法制备的ZrO_2 / Al_2O_3双层薄膜栅电介质薄膜的特性
机译:用于高k电介质和存储器应用的原子层沉积Al2O3和TiO2
机译:带有原子层沉积ZnO电荷陷阱层的非晶In-Ga-Zn-O薄膜晶体管存储器的电压极性相关编程行为
机译:原子层沉积法制备栅介质ZrO2 / al2O3双层薄膜的特性
机译:用于射频mEms电容开关的替代介电薄膜,使用原子层沉积的al2O3 / ZnO合金沉积