Preparation and characterization of Pd-Ag alloy composite membrane with magnetron sputtering

摘要

A Pd-Ag(24 wt/100)alloy composite membrane was prepared by the magnetron sputtering. A γ-Al_2O_3 membrane was synthesized by the sol-gel method and used as substrate of the Pd-Ag alloy film. The process parameters of the magnetron sputtering were optimized as a function of the compactness of Pd-Ag alloy film. The best membrane with a thickness of 1μm was produced with a sputtering pressure of 2.7 Pa and a substrate temperature of 400 deg. C. The membrane had an H_2/N_2 permselectivity of 51.5-1000 and an H_2 permeation rate of 0.036-1.17×10~-5 cm~3/cm~2.s. Pa, depending on operating conditions.