机译:RF MEMS器件的灵活制造工艺
Fondazione Bruno Kessler - FBK,Center for Materials and Microsystems - CMM,MEMS Research Unit, Via Sommarive 18,38123 Povo - Trento, Italy;
Fondazione Bruno Kessler - FBK,Center for Materials and Microsystems - CMM,MEMS Research Unit, Via Sommarive 18,38123 Povo - Trento, Italy;
Fondazione Bruno Kessler - FBK,Center for Materials and Microsystems - CMM,MEMS Research Unit, Via Sommarive 18,38123 Povo - Trento, Italy;
Fondazione Bruno Kessler - FBK,Center for Materials and Microsystems - CMM,MEMS Research Unit, Via Sommarive 18,38123 Povo - Trento, Italy;
Fondazione Bruno Kessler - FBK,Center for Materials and Microsystems - CMM,MEMS Research Unit, Via Sommarive 18,38123 Povo - Trento, Italy;
Fondazione Bruno Kessler - FBK,Center for Materials and Microsystems - CMM,MEMS Research Unit, Via Sommarive 18,38123 Povo - Trento, Italy;
机译:聚酰亚胺柔性基板上MEMS器件的新型制造工艺
机译:基于氢化非晶硅锗薄膜的微结构的制造工艺,用于MEMS器件
机译:可移动MEMS器件的单掩模制造工艺
机译:用于制造RF-MEMS器件的灵活技术平台
机译:高性能RF MEMS器件的设计和制造。
机译:MEMS S&A器件金属/硅复合结构的混合制造工艺
机译:溶液加工的分层六边形硼氮化物电介质:朝向高性能柔性器件的制造途径
机译:利用mEms技术制造球形微型器件封装的工艺开发。