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MEMS DEVICE WITH FLEXIBLE TRAVEL STOPS AND METHOD OF FABRICATION
MEMS DEVICE WITH FLEXIBLE TRAVEL STOPS AND METHOD OF FABRICATION
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机译:具有灵活的行程停止的微机电装置及其制造方法
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摘要
A microelectromechanical systems (MEMS) device is provided, which includes a substrate; a proof mass positioned in space above a surface of the substrate, where the proof mass is configured to move relative to the substrate; a flexible travel stop structure formed within the proof mass, where the flexible travel stop structure includes a contact lever connected to the proof mass via flexible elements; and a bumper formed on the surface of the substrate, where the contact lever is aligned to make contact with the bumper when the proof mass moves toward the substrate.
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