Combined scanning confocal microscopy with dark-field microscopy

摘要

The concepts of dark-field microscopy for performing metrology are well known, for example in the context of monitoring or alignment in lithographic processes. Typical Dark-field microscopy techniques use cameras and an incoherent light source. For example, a target may be illuminated with a stationary large illumination spot. The zeroth order is blocked (spatially filtered) at the pupil plane with a pupil stop or zeroth order block. The filtered pupil is then re-imaged at the image plane. Here it is proposed to use the techniques of scanning confocal microscopy with dark-field microscopy. This leads to dark-field microscopy with the following benefits: 1.No need for cameras 2. parallel detection of numerous (e.g., 12 Colors) 3. photon efficient (internal spatial coherence scrambler).