Reconditioning of substrate support by means of a annular coated substrate

摘要

This research disclosure relates to a substrate and a method for reconditioning a substrate support. Especially, it is related to reconditioning of protrusions, or burls, at the outer side of the a substrate support, by means of a thin film provided at a substrate backside arranged in an annular arrangement. Substrate supports, e.g., wafer tables, arc workpicccs consisting of a body material, which is typically provided with a plurality of protrusions, also called burls. The primary function of the substrate support and the burls is to support a substrate. Typically, the top-surfaces of the burls are configured with a nano-roughncss to minimize the impact of friction between the substrate and the burls, which is beneficial for overlay performance. During use, the substrate support is exposed to fluids, e.g., rinsing and or immersion liquids, and interacts with the backside of the substrates loaded onto the substrate support. Herewith, the nano-roughness on top of the burls is slowly smoothed away with every wafer load and unload, and diminishing the lifetime of the substrate support dramatically.