VOLTAGE CONTRAST STUDIES ON 0.5 μm INTEGRATED CIRCUITS BY SCANNING FORCE MICROSCOPY

摘要

A scanning force microscope (SFM) test system is used for voltage contrast studies on 0.5 μm integrated circuits. Waveform measurements are performed on passivated 0.5 μm conducting lines up to 4 GHz. Additionally two-dimensional measurements at 10 MHz demonstrate the potential for device internal function and failure analysis in the sub-μm regime by direct correlation between voltage contrast and quantitative topography images.