Sensing applications of micro- and nanoelectromechanical resonators

摘要

The sensitivity of micro- and nanoscale resonator beams for sensing applications in ambient conditions was investigated. Micro-electromechanical (MEMS) and nanoelectromechanical systems (NEMS) were realized using silicon carbide (SiC) and polycrystalline aluminium nitride (AlN) as active layers on silicon substrates. Resonant frequencies and quality factors in vacuum as well as in air were measured. The sensitivity behaviour under ambient conditions with a mass loading in the range of picogram (pg) was verified and measurements with biological mass loading were performed. In addition, the sensitivity to pressure variations was analysed.