THIN-FILM MICRO-MACHINE TYPE RESONATOR, THIN-FILM MICRO- MACHINE TYPE RESONATOR GYROSCOPE, NAVIGATION SYSTEM AND AUTOMOBILE USING THE RESONATOR GYROSCOPE

摘要

PPROBLEM TO BE SOLVED: To provide a thin-film micro-machine type resonator which is improved in driving efficiency, a thin-film micro-machine type resonator gyroscope which is improved in detection sensitivity with respect to impressed angular velocities by improving its driving efficiency, and a navigation system and an automobile using the resonator gyroscope. PSOLUTION: The thin-film micro-machine type resonator comprises a tuning fork having arms 2 and 3 and a base section 4 connecting the arms 2 and 3 to each other, first and second electrodes 10, 12, 11, 13 respectively and separately provided on the insides and outsides of center lines drawn on the principal surfaces 5 of the arms 2 and 3, and first and second piezoelectric thin films 14, 16, 15, and 17 respectively provided on the electrodes 10, 12, 11, and 13. The resonator also comprises third and fourth electrodes 18, 20, 19, and 21 respectively provided on the thin films 14, 16, 15, and 17. PCOPYRIGHT: (C)2003,JPO