studies on roll-off-less polishing of magnetic disk substrate (1st report) -change of substrate edge shape in polishing process-

摘要

This report deals with the enlarging method of the recording area per a magnetic disk substrate by means of repressing the edge roll-off formed by polishing. The change of the edge shape in polishing process is experimentally examined in detail by measuring the edge shape in the accuracy of nanometer order with WYKO. To clear the formation mechanism of edge shape by polishing, the influence of the revolution of the polisher and the substrate on the edge shape formation is separately investigated and discussed.