Study on Diamond Thin Films Deposition in a Quartz Bell-jar Type System for MWPCVD

摘要

Diamond thin films were prepared in a modified quartz bell-jar type microwave chemical vapor deposition (MWPCVD) system. The influences of process parameters on MW- PCVD diamond thin films quality such as substrate pretreatment, deposition gas ratio, deposition Pressure and substrate position were examined and studied. The deposited films were character- Ized by using Scanning electron microscopy (SEM) and Raman spectroscopy. It was shown that This quartz bell-jar type MWPCVD system is beneficial to the deposition of high quality diamond Thin films.