Pretreatment study on the deposition of Diamond-Like Carbon films on quartz by Star-Shape MPCVD reactor

摘要

Diamond-Like Carbon (DLC) films were deposited on quartz substrates by using a gas mixture of hydrogen-methane-oxygen in the Star-Shape Microwave Plasma enhanced Chemical Vapor Deposition (MPCVD) reactor. The pretreatment parameters include the pretreatment methods and the pretreatment time was optimized. Results showed that ultrasonically abrasive in the acetone solution with nano-crystalline diamond powder in it was an efficient pretreatment method to advance the deposition of DLC films, and 10 minute turned to be the most appropriate time for this pretreatment. The Fourier Transform Infrared spectrometer (FTIR) showed that the DLC films synthesized by the optimized technics have high transparence fit for optical applications. These indicated that the Star-Shape MPCVD reactor was the perfect equipment for the volume-produce of DLC films for its unique big reactive cavity.