CRYSTAL OSCILLATION-TYPE FILM THICKNESS MONITORING DEVICE AND EVAPORATION SOURCE DEVICE AND THIN FILM DEPOSITION SYSTEM OF EL MATERIAL USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a crystal oscillation-type film thickness monitoring device suitable for linear source; and an evaporation source device and a thin film deposition system of EL material using the film thickness monitoring device.;SOLUTION: A crystal oscillation-type film thickness monitoring device is provided with a disc-like crystal oscillator holder 10 for holding a plurality of crystal oscillators 50 along the outer peripheral end, a header having a cover 20 for covering the surface and provided with an opening 21 only at a position corresponding to one crystal oscillator, a rotary mechanism installed in the rear face of the header and resonance frequency detection means for detecting the resonance frequency of one crystal oscillator of which surface is exposed to the outside from the opening accompanied with the rotation of the holder. In the film thickness monitoring device, the periphery of the disc-like holder composing the header is hollowed in a conical shape to the inside by the angle θ, and the perpendicular extended from the surface of the crystal oscillator is inclined by the angle θ against the rotation axis of the disc-like holder, and the rotary mechanism including a drive part 550 for rotating the holder is installed in a vertically extended direction with respect to the rotation axis of the crystal oscillator holder.;COPYRIGHT: (C)2012,JPO&INPIT