Production of Low Electron Temperature Plasma and Coating of Carbon-Related Water-Repellent Films on Plastic Plate

摘要

Low electron temperature plasma with a value less than 2 eV was produced by the inductively coupled discharge with a three-turn spiral antenna and the radio-frequency-biased grid for hard coating of carbon-related water-repellent thin films on plastic plate. It was found that the electron temperature decreased with increasing a negative biasing voltage $V_{G}$ for $V_{G} < -100 hbox{V}$ and, then, electron population becomes bicomponent with the higher temperature of about 10 eV and the lower temperature of less than 2 eV. The water-repellent thin films were also prepared on polycarbonate and silicon wafer substrates in the low electron temperature plasma using $hbox{C}_{2}hbox{H}_{2}hbox{F}_{2}$ and Ar mixture gases. The wetting contact angle and the pencil hardness were discussed.