Electrical and Optical Characterization of Atmospheric-Pressure Helium Plasma Jets Generated With a Pin Electrode: Effects of the Electrode Material, Ground Ring Electrode, and Nozzle Shape

摘要

This paper tests various design and operation parameters in atmospheric-pressure helium plasma jets generated with a pin electrode to provide a plasma environment well suited for material processing or biomedical applications. The effects of the pin electrode materials (Cu, W, and Al), the position, and the width of a ground ring electrode on the characteristics of the jets are studied. The inner quartz tube encompassing the pin electrode and two types of the outer quartz tubes (straight or tapered cylinder shape) are employed, and their effects are investigated. The electrical characteristics of the plasma jets are measured by current–voltage measurements and analyzed by the equivalent circuit model. The optical characteristics of the discharges are obtained by optical emission spectroscopy to identify various excited plasma species produced in the plasma jets. Optical emission spectra are also obtained at different positions along the coaxial direction. A variety of choices in design parameters and operation parameters are undertaken to determine optimal conditions and elucidate the properties of the plasma jets.