Repetitive High-Voltage All-solid-state Marx Generator for Excimer DBD UV Sources

摘要

In order to develop an efficient and reliable pulsed power supply for excimer dielectric barrier discharge (DBD) ultraviolet (UV) sources, a pulse generator using Marx topology is adopted. MOSFETs are used as switches. The 12-stage pulse generator operates with a voltage amplitude in the range of 0-5.5 kV. The repetition rate and pulsewidth can be adjusted from 0.1 to 50 kHz and 2 to 20 μs, respectively. It is used to excite KrCl* excilamp, a typical DBD UV source. In order to evaluate the performance of the pulse generator, a sinusoidal voltage power supply dedicated for DBD lamp is also used to excite the KrCl* excilamp. It shows that the lamp excited by the pulse generator has better performance with regard to radiant power and system efficiency. The influence of voltage amplitude, repetition rate, pulsewidth, and rise and fall times on radiant power and system efficiency is investigated using the pulse generator. An inductor is inserted between the pulse generator and the KrCl* excilamp to reduce electromagnetic interference and enhance system reliability.