Impedance matching for repetitive high voltage all-solid-state Marx generator and excimer DBD UV sources

摘要

The purpose of impedance matching for a Marx generator and DBD lamp is to limit the output current of the Marx generator,provide a large discharge current at ignition,and obtain fast voltage rising/falling edges and large overshoot.In this paper,different impedance matching circuits (series inductor,parallel capacitor,and series inductor combined with parallel capacitor) are analyzed.It demonstrates that a series inductor could limit the Marx current.However,the discharge current is also limited.A parallel capacitor could provide a large discharge current,but the Marx current is also enlarged.A series inductor combined with a parallel capacitor takes full advantage of the inductor and capacitor,and avoids their shortcomings.Therefore,it is a good solution.Experimental results match the theoretical analysis well and show that both the series inductor and parallel capacitor improve the performance of the system.However,the series inductor combined with the parallel capacitor has the best performance.Compared with driving the DBD lamp with a Marx generator directly,an increase of 97.3％ in radiant power and an increase of 59.3％ in system efficiency are achieved using this matching circuit.