Vertical scanning white-light interference microscopy on curved microstructures

摘要

Although white-light interferometers have become well-established tools for measuring smooth, rough, and micro-nstructured surfaces, there are some limitations in certain applications, e.g., if tilted surface areas or small radii ofncurvature are to be measured. Since the correction of chromatic aberrations is not perfect over the total field of viewnor the total pupil plane, dispersion differences occur for different ray paths of the microscopic imaging system. Theninfluence of these effects is discussed on the basis of the most commonly used Mirau interferometer, and the re-nsulting systematic measuring errors are explained. © 2010 Optical Society of America