THREE-DIMENSIONAL SHAPE MEASUREMENT METHOD USING SCANNING WHITE-LIGHT INTERFERENCE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional shape measurement method of effectively utilizing data on a measurement signal obtained with a scanning white-light interference microscope, and detecting a peak in the signal correctly as much as possible.;SOLUTION: In a three-dimensional shape measurement method using a scanning white-light interference microscope, data on all measurement signals of a sample to be measured, obtained with the scanning white-light interference microscope, are held.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2018,JPO&INPIT