METHOD FOR THREE-DIMENSIONAL SHAPE MEASUREMENT USING SCAN-TYPE WHITE-COLOR INTERFERENCE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional shape measurement using a scan-type white-color interference microscope, the measurement allowing an adequate measurement of the surface of a measurement object (sample) with a large inclination angle.SOLUTION: The present invention relates to a method for measuring a three-dimensional shape, using a scan-type white-color interference microscope, the method including acquiring an envelope curve of an interference signal of light from a light source emitted to a measurement object, acquiring an observation coherence length lc', which is an observed apparent coherence length, on the basis of the half-value width of the envelope curve, and measuring the inclination angle of the surface of the measurement object on the basis of the observed coherence length lc'.SELECTED DRAWING: Figure 4